Self-sensing Long-displacement MEMS Device is a high-precision microelectomechanical system capable of accurately sensing the linear displacement of a moving platform. The device also constrain platform motion to the desired direction. Piezoresistivity provides an electrical output that is proportional to the platform displacement. The output signal can be used for feedback control, system diagnostics, or as part of a sensor. Displacements greater than 500 micrometers are possible. This device is generally smaller than corresponding flexible structures that provide the same displacement. The piezoresistive response is much larger, linear, and monotonic. Comparable flexible structures have a smaller, nonlinear, and non-monotonic response. Sliding structures have friction and binding issues that make them unreliable. Sliding structures cannot do self sensing.
The device can enable or improve MEMS applications such as micro-robotics, micro-assembly, optical scanners using a moving micro-mirror, and brain probes. This device integrates the motion elements and sensing elements. It also provides an accurate method for displacement measurement with a system that can be put on a chip with other components. In contrast, many current sensors for nanopositioning are table-top devices.
For licensing information, contact the BYU Office of Technology Transfer.
Messenger, Robert, “Integrated Piezoresistive Sensing for Feedback Control of Compliant MEMS,” Ph.D. Dissertation, Brigham Young University, December 2007.