Piezoresistive Microdisplacement Transducer (PMT) is a high-precision microelectomechanical system capable of accurately sensing the linear displacement of a moving shuttle. The PMT uses integrated piezoresistive sensing to monitor the shuttle displacement. Using the PMT as a feedback sensor for closed-loop control provides excellent tracking with no evident steady-state error.
Feedback control of microelectromechanical systems (MEMS) has the potential to significantly improve device performance and reliability. One of the main obstacles to feedback control’s broader use has been the lack of on-chip sensing options. Many high-precision or position-sensitive devices may be made possible (e.g. optical scanners using a moving micro mirrors, micro robotics, micro assemply) by this technology.
U.S. Patent 7,616,013
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Messenger, R.K., Aten, Q., McLain, T.W., and Howell, L.L., “Piezoresistive Feedback Control of a MEMS Thermal Actuator,” Journal of Microelectromechanical Systems, Vol. 18, No. 6, pp. 1267-1278, 2009.
Messenger, Robert, “Integrated Piezoresistive Sensing for Feedback Control of Compliant MEMS,” Ph.D. Dissertation, Brigham Young University, December 2007.